Product Description

MEMC***0 Series Mass Flow Controller

The MEMC***0 series Mass Flow controllers (MFC) are used to accurately measure and control the flow of gaseous medium.

 

The basic principle of MEMC***0 series MFC flow measurement is the principle of thermal diffusion. Theoretically, the change of medium pressure and temperature does not affect the accuracy of flow measurement, which is conducive to improving the accuracy and reliability of measurement.

 

The MEMC***0 series MFC integrated the technologies of MEMS (Micro Electro Mechanical Systems), digital signal processing, advanced control, and digital simulation. MEMC***0 series MFC uses flow sensing components of semiconductor companies in the United States and Kofloc proportional valve components. The whole process of product production and inspection strictly implements quality control to ensure the accuracy and long-term reliability of the product.

 

Application:

Photovoltaic material process equipment, semiconductor process equipment, lithium battery material process equipment, medical and pharmaceutical gas equipment, laboratory micro reaction device, gas mixing system, gas chromatograph, optical fiber process equipment.

 

Technical Parameter:

Pressure:  1:*0

Response time:< *0ms (****0% F.S.)

Stabilization time:< 1s (****0% F.S.)

Accuracy level:±1% F.S.

Repeatability:< 0.*5% F.S.

Sensitivity:< 0.1% F.S.

Communication: RS**5 / ***0m